ETS-Lindgren's wideband high resolution digital Magnetic Active Compensation System (MACS/D) provides cost-effective, maintenance-free attenuation of environmental magnetic fields adversely affecting high resolution Electron Microscopy (EM), Nuclear Magnetic Resonance (NMR) spectroscopy, e-beam wafer fabrication (lithography), and other charged-beam instrumentation and manufacturing operations. Patented Adjustable Compensation Ratio (ACR) technology can provide additional interfering field reduction in high gradient interfering field situations due to close proximity sources.
ETS-Lindgren's EMF-compensating (EMFC) MACS/D systems provide cost-effective, maintenance-free high performance attenuation of dynamic environmental magnetic fields for maximum performance of high resolution electron microscopy instrumentation and other sensitive charged-beam scientific and production apparatus. The ETS-Lindgren MACS/D system features high resolution, ultra low latency digital signal processing with characteristically low intrinsic noise floor and negligible drift, permitting wide dynamic range and inherent stability. For special applications requiring ultra low system noise or extended high- or low-frequency response, specialized probes and complementary signal processing options are available.
ACR technology (U.S. patent 9,692,391 B2) incorporated in the MACS/D digital architecture typically provides a higher interference attenuation factor than other active compensation systems or passive shielding systems in sites subject to high interfering field gradients. This feature permits, when significant interfering signal gradients are encountered, location of the MACS/D sensor probe away from sources of high extraneous magnetic fields such as ion pumps without significant attenuation loss at the protected instrument location.
MACS/D capabilities are based on fast, high-resolution DSP based signal processing and a unique control/computing architecture that provides maximum software and firmware flexibility. In addition to performance and operational advantages, the MACS/D system can be either locally or remotely updated with software and DSP firmware upgrades, maximizing long-term utility. Signal processing within the MACS/D system is accomplished entirely in the digital domain by a high-performance DSP engine that facilitates an overall system latency on the order of microseconds.
The MACS/D system's negative feedback closed loop configuration provides high attenuation over a dynamic range extending from 0.2 nT (20 G) to at least 45 Tesla (450 mG) with standard compensation coil sets. MACS/D standard compensation coil are comprised of a set of 0.5 inch (13 mm) diameter cables which define the endplanes of the Operational Volume (OV) for each of the three axes. Additionally, an efficient, high-power multichannel coil driver amplifier provides extraordinary system capability and reliability in compensation of high interfering fields. Large dynamic range and enhanced long-term system reliability for sites subject to high-level interfering fields are significant MACS/D advantages over currently available competing active magnetic field compensation systems.
The MACS/D system controller front panel screen provides three-axis scrolling displays of the residual magnetic fields, with concurrent numeric readouts of instantaneous axial field values, the MACS/D system configuration, system state, time and date, and LAN IP. An embedded machine control computer (MCC) provides full LAN-based capability for site setup and remote diagnostic viewing. This capability includes a real-time HTML-based monitoring display in which up to 35 parameters may be selected for simultaneous viewing. Fully implemented VPN client support is available for secure remote diagnostics and remote data capturing; the VPN support ensemble also includes provision for downloading of software upgrades.
From a reputation as industry leader with over 200 high performance MACS EMFC installations worldwide, introduction of the MACS/D system advances ETS-Lindgren to the preeminent position of currently sourcing the world's premier active compensation system for electron microscopy and other sensitive charged-beam instrumentation and manufacturing operations.
Read the recent White Paper on this system: ACTIVE MAGNETIC FIELD COMPENSATION SYSTEMS A COMPARATIVE STUDY